Chemical Management Systems

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Chemical Management PDF Brochure
New Marangoni
Dryers
IPA Vapor
Dryers
FOUP Washers
Box Cleaners
PhotoMask
Cleaners
Chemical Management
Automated
Wet Benches
Used
Wet Benches
SemiAutomated
Wet Benches
Manual
Wet Benches
DNS WS-820
Controller Upgrade
DI Water : CO2
Sparger Gasifier
Specialty Spin
Cleaners
Quartz Parts
Cleaners
Used Marangoni
Dryers
Used DI Water
Heaters
Chemical Blending, Dilution, Delivery, & Waste Capture
Accurate FAB proven "Point of Use" blending shown here. Multiple POU units can be housed in a single cabinet enabling any combination of blended process chemistries.
Illustrated above is a system that precisely blends DI Water with 2ea Chemicals (from drum sources) into a mixing vessel. The mixing vessel is continuously recirculated and can be heated and filtered.

The perfect blend of chemistry is properly maintained and fed to the process tool on request. All is accomplished in one neatly packaged exhausted containment cabinet.
Don't have a suitable house drain? We make sensored day tanks, that when full, automatically pump captured waste to suitable storage drums. The capture systems are designed to comply with EHS requirements. The above illustrates some features of a typical chemical capture system.
No more dangerous and inaccurate hand pouring. It's time to upgrade to safe, accurate, automated chemical delivery.

These custom chemical mixing systems are made to communicate with your process tools. The benefits are safety, accuracy, repeatability, and convenience.
"Point of Use" Style - Chemical Mixing System
Day Tank Style - Chemical Mixing System
Chemical Waste Capture Systems
Metal Lift-Off
Equipment
Single Wafer Spin
Processors